Half-micrometer linewidth metrology

This investigation studies linewidth metrology techniques and compares SEM measurement results with an electrical linewidth probe procedure. Calibration offsets between reticle, resist, etched, and electrical probe dimensions are compared for the 500-nm nominal isolated and grouped images. These individual probe-site measurements, as monitored with a low-voltage SEM through this process, are then compared to individual-site and full-field electrical data.