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Mark D. Kellam
Mark D. Kellam
Materials science
Electronic engineering
Actuator
Electronics
Very-large-scale integration
4
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48
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Membrane based actuator-integrated force arrays
1994
ECTC | Electronic Components and Technology Conference
J.E. Bousaba
Stephen M. Bobbio
Scott H. Goodwin-Johansson
Mark D. Kellam
Bruce W. Dudley
James Jacobson
Susan K. Jones
Thomas D. DuBois
Farid M. Tranjan
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Citations (1)
Integrated force arrays
1993
MEMS | International Conference on Micro Electro Mechanical Systems
Stephen M. Bobbio
Mark D. Kellam
B. W. Dudley
Scott H. Goodwin-Johansson
S. K. Jones
James Jacobson
Farid M. Tranjan
Thomas D. DuBois
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Citations (47)
Characterization of wavelength offset for optimization of deep-UV stepper performance
1991
Susan K. Jones
Bruce W. Dudley
Charles R. Peters
Mark D. Kellam
Edward K. Pavelchek
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Entrenched Metal Liftoff Using A Novel Bilayer Process
1990
Thomas D. DuBois
Farid M. Tranjan
S. K. Jones
Stephen M. Bobbio
Mark D. Kellam
R. G. Frieser
A D Jones
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