Membrane based actuator-integrated force arrays

Integrated Force Arrays (IFAs) are membrane based actuators that are made of polyimide material. They are metallized membranes that are flexible enough to undergo substantial deformation when a voltage is applied. IFAs can be patterned using the techniques of VLSI electronics. They can be integrated in arrays to form complex systems that have wide range of applications. The theory of operation and the methods of construction are presented. >