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Charles R. Peters
Charles R. Peters
Research Triangle Park
Materials science
Optics
Optoelectronics
Excimer laser
Laser
5
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5
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Anti‐reflective coating for deep UV lithography process enhancement
1992
Polymer Engineering and Science
Gregg Barnes
Tony D. Flaim
Susan K. Jones
Bruce W. Dudley
David A. Koester
Charles R. Peters
Stephen M. Bobbio
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Wavelength tuning for optimization of deep-UV excimer laser performance
1992
Susan K. Jones
Elliott Sean Capsuto
Bruce W. Dudley
Charles R. Peters
Gary C. Escher
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Enhancement of deep-UV patterning integrity and process control using antireflective coating
1992
Bruce W. Dudley
Susan K. Jones
Charles R. Peters
David A. Koester
Gregg Barnes
Tony D. Flaim
James E. Lamb
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Strategies for deep-UV patterning of half-micron contacts using negative photoresists
1992
Susan K. Jones
Elliott Sean Capsuto
Bruce W. Dudley
Satyendra S. Sethi
Charles R. Peters
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Characterization of wavelength offset for optimization of deep-UV stepper performance
1991
Susan K. Jones
Bruce W. Dudley
Charles R. Peters
Mark D. Kellam
Edward K. Pavelchek
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