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Youhei Hayase
Youhei Hayase
Toshiba
Spreading resistance profiling
Analytical chemistry
Dopant
Doping
Microscopy
4
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4
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0
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Imaging and nano-probing of doping in Si by site-specific scanning spreading resistance microscopy (SSRM)
2014
IWJT | International Workshop on Junction Technology
Li Zhang
Kyoichi Suguro
K. Ohuchi
K. Hara
Youhei Hayase
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Direct observation of boron dopant fluctuation by site-specific scanning spreading resistance microscopy
2012
IRPS | International Reliability Physics Symposium
Li Zhang
Y. Mitani
Atsuhiro Kinoshita
Shiro Takeno
Kyoichi Suguro
Ichiro Mizushima
S. Mori
K. Yamamoto
Junji Koga
K. Hara
Youhei Hayase
S. Ogata
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Applications of site-specific scanning spreading resistance microscopy (SSRM) to failure analysis of production lines
2012
IWJT | International Workshop on Junction Technology
Youhei Hayase
K. Hara
Shinsuke Ogata
Li Zhang
Haruko Akutsu
Michio Kurihara
Kenji Norimatsu
Shinji Nagamine
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Direct visualization of anomalous-phosphorus diffusion in failure-bit gates of SRAM-load pMOSFETs with high-resolution scanning spreading resistance microscopy
2010
IEDM | International Electron Devices Meeting
Li Zhang
K. Hara
Atsuhiro Kinoshita
Tsuneyuki Hashimoto
Youhei Hayase
Michio Kurihara
Daisuke Hagishima
Takayuki Ishikawa
Shiro Takeno
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Citations (3)
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