Old Web
English
Sign In
Acemap
>
authorDetail
>
Noboru Fukiharu
Noboru Fukiharu
Kyushu University
Materials science
Substrate (chemistry)
Grinding
Metallurgy
sic substrate
3
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Investigation on high efficiency and quality CMP of SiC substrate surface preprocessed by ELID grinding
2018
Noboru Fukiharu
Hironori Sekiguchi
Syuhei Kurokawa
Terutake Hayasi
Yoji Matsukawa
Show All
Source
Cite
Save
Citations (0)
Consideration of high efficient polishing of SiC substrate with grinding process as a pre-process
2017
Noboru Fukiharu
Chengwn Wang
Takaaki Toyama
Syuhei Kurokawa
Terutake Hayasi
Yoji Matsukawa
Show All
Source
Cite
Save
Citations (0)
CMP Characteristics for SiC Substrates Irradiated by Femtosecond Laser
2017
Syuhei Kurokawa
lt
strong gt
Chengwu Wang lt
Toshiro Doi
Yasuhisa Sano
Hideo Aida
Koki Oyama
Terutake Hayashi
Noboru Fukiharu
Show All
Source
Cite
Save
Citations (0)
1