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Investigation on high efficiency and quality CMP of SiC substrate surface preprocessed by ELID grinding
Investigation on high efficiency and quality CMP of SiC substrate surface preprocessed by ELID grinding
2018
Noboru Fukiharu
Hironori Sekiguchi
Syuhei Kurokawa
Terutake Hayasi
Yoji Matsukawa
Keywords:
Substrate (chemistry)
Grinding
Composite material
Materials science
Metallurgy
sic substrate
Correction
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