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Hiroshi Asechi
Hiroshi Asechi
Optoelectronics
Ion implantation
Materials science
Plasma
Capacitor
3
Papers
4
Citations
0
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2024
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High density, plasma flood system (HD PFS) yield enhancement for the precision implant 9500
1999
D. Sempek
Hiroyuki Ito
Hiroshi Asechi
M Reilly
M. C. Vella
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High density plasma flood system for wafer charge neutralisation
1999
Hiroyuki Ito
Hiroshi Asechi
Yasuhiko Matsunaga
Masahiko Niwayama
Kenji Yoneda
M. C. Vella
Mike Reilly
Walt Hacker
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Plasma flood system for the Precision Implant 9200
1996
M. C. Vella
N. Aoki
Hiroyuki Ito
Hiroshi Asechi
P. Hacker
R. Couchot
S. Nishio
M Reilly
N. Sugiyama
M. Yamanishi
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Citations (2)
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