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O. Fortagne
O. Fortagne
Materials science
Piezoresistive effect
Cantilever
Optics
Electron-beam lithography
4
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64
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Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications
2007
Microelectronic Engineering
Ivo W. Rangelow
Tzv. Ivanov
K. Ivanova
B. Volland
P. Grabiec
Y. Sarov
A. Persaud
T. Gotszalk
P. Zawierucha
M. Zielony
D. Dontzov
Bernd Schmidt
M. Zier
N. Nikolov
I. Kostic
Wolfgang Engl
T Sulzbach
J. Mielczarski
Stefan Kolb
Du P. Latimier
R. Pedreau
V. Djakov
S.E. Huq
Klaus Edinger
O. Fortagne
A. Almansa
Hans-Olof Blom
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Citations (47)
Piezoresistive Self-Actuated Cantilever Arrays for Nanotechnological Application
2006
Tzv. Ivanov
B. Volland
Ivo W. Rangelow
A. Persaud
K. Ivanova
Y. Sarov
B D Dontzov
T. Gotszalk
B Smidt
M. Zier
N. Nikolov
I. Kostic
T Sulzbach
J. Mielczarski
Stefan Kolb
S Djakov
Klaus Edinger
O. Fortagne
Hans-Olof Blom
A. Almansa
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A special method to create gratings of variable line density by low voltage electron beam lithography
1996
Microelectronic Engineering
B. Niemann
Thomas Wilhein
T. Schliebe
O. Fortagne
Rainer Plontke
Ines Stolberg
Matthias Zierbock
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Citations (12)
WePrint 200 - The fast e-beam printer with high throughput
1995
Microelectronic Engineering
O. Fortagne
P. Hahmann
Ch. Ehrlich
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Citations (5)
1