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Piezoresistive Self-Actuated Cantilever Arrays for Nanotechnological Application
Piezoresistive Self-Actuated Cantilever Arrays for Nanotechnological Application
2006
Tzv. Ivanov
B. Volland
Ivo W. Rangelow
A. Persaud
K. Ivanova
Y. Sarov
B D Dontzov
T. Gotszalk
B Smidt
M. Zier
N. Nikolov
I. Kostic
T Sulzbach
J. Mielczarski
Stefan Kolb
S Djakov
Klaus Edinger
O. Fortagne
Hans-Olof Blom
A. Almansa
Keywords:
Piezoresistive effect
Cantilever
Electronic engineering
Materials science
Optoelectronics
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