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Franklin M. Schellenberg
Franklin M. Schellenberg
SEMATECH
Lithography
Interferometry
Optics
Engineering
Materials science
5
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26
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SEMATECH J111 project: OPC validation
1998
Franklin M. Schellenberg
Hua Zhang
Jim Morrow
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Citations (7)
Interferometric Lithography Tool for 180-nm Structures
1997
Storage and Retrieval for Image and Video Databases
Saleem H. Zaidi
Steven R. J. Brueck
Franklin M. Schellenberg
Robert S Mackay
K. Uekert
J. J. Persoff
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Citations (2)
Interferometric lithography exposure tool for 180-nm structures
1997
Saleem H. Zaidi
Steven R. J. Brueck
Franklin M. Schellenberg
R. Scott Mackay
K. Uekert
Jeffrey J. Persoff
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Citations (11)
Interferometric lithography exposure tool for 180-nm structures
1997
Saleem H. Zaidi
Steven R. J. Brueck
Franklin M. Schellenberg
R. S. Mackay
K. Uekert
J. J. Persoff
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Citations (1)
Evaluation of OPC efficacy
1996
Franklin M. Schellenberg
Hua Zhang
Jim Morrow
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Citations (5)
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