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Interferometric Lithography Tool for 180-nm Structures
Interferometric Lithography Tool for 180-nm Structures
1997
Saleem H. Zaidi
Steven R. J. Brueck
Franklin M. Schellenberg
Robert S Mackay
K. Uekert
J. J. Persoff
Keywords:
Lithography
Interferometry
Optics
Materials science
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