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Mami Miyasaka
Mami Miyasaka
NEC
Lithography
Electron-beam lithography
Acceleration voltage
Wafer
Electronic engineering
3
Papers
3
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0
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2024
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Development of data conversion system for electron-beam projection lithography (EPL) mask
2001
Yasuhisa Yamada
Hideo Kobinata
Takao Tamura
Mami Miyasaka
Tatsuya Sakamoto
Yuzo Ogawa
Kenichi Takada
Hiroshi Yamashita
Hiroshi Nozue
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EB projection lithography for 60-80 nm ULSI fabrication
2000
VLSIT | Symposium on VLSI Technology
Kenichi Tokunaga
Fumihiro Koba
Mami Miyasaka
Y Takaishi
K. Noda
Hiroshi Yamashita
K. Nakajima
Hiroshi Nozue
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Optimization of PHS-based chemically amplified negative resist for 100-kV electron-beam projection lithography (EPL)
2000
Mami Miyasaka
Kenichi Tokunaga
Fumihiro Koba
Hiroshi Yamashita
Ken Nakajima
Hiroshi Nozue
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