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Kenichi Takada
Kenichi Takada
NEC
Data structure
Acceleration voltage
Chip
Lithography
Data conversion
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2024
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Development of data conversion system for electron-beam projection lithography (EPL) mask
2001
Yasuhisa Yamada
Hideo Kobinata
Takao Tamura
Mami Miyasaka
Tatsuya Sakamoto
Yuzo Ogawa
Kenichi Takada
Hiroshi Yamashita
Hiroshi Nozue
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