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Salvador P. Umotoy
Salvador P. Umotoy
Materials science
Plasma
Depot
Vacuum pump
Wafer
5
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0
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Vorrichtungen zur atomschichtabscheidung
2009
Hyman W. H. Lam
Bo Zheng
Ai Hua
Michael Jackson
Xiaoxiong Yuan
Hou Gong Wang
Salvador P. Umotoy
San-Ho Yu
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Appareil utile pour le depot cyclique de films minces
2003
Ayad Al-Shaikh
Avgerinos V. Gelatos
Walter Benjamin Glenn
Ahmad A. Khan
Alfred Mak
Randhir Thakur
Salvador P. Umotoy
Ming Xi
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Semiconductor-treating reactor
1993
John A. Adamik
Kenneth S Collins
Meidan Dan
S Raw Kam
Cissy Leung
Ilya Perlov
Salvador P. Umotoy
David Nin-Kou Wang
John M. White
paarofu iruya
esu . rou kamu
esu korinzu kenisu
pii umotoi saruvu a doru
ryuun sisii
ei adamiku jon
emu howaito jon
meidan dan
nin kuu wan dividdo
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Procèdè de dèpÔt chimique en phase vapeur à l'aide d'un plasma de dioxyde de silicium à partir de TEOS.
1987
David Nin-Kou Wang
John M. White
Kam S. Law
Cissy Leung
Salvador P. Umotoy
Kenneth S. Collins
John A. Adamik
Ilya Perlov
Dan Maydan
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Plasma assisted CVD method of TEOS basis for the preparation of silicas.
1987
David Nin-Kou Wang
John M. White
Kam S. Law
Cissy Leung
Salvador P. Umotoy
Kenneth S. Collins
John A. Adamik
Ilya Perlov
Dan Maydan
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