author-photo

C.H. Ellenwood

National Institute of Standards and Technology

19

Papers

137

Citations

Citation Trend

Filter By

Papers (13) Sort By

Journal Conference Others

Microhotplate-Based Sensor Platform for Standard Submicron CMOS SoC Designs

2005 ISDRS | International Semiconductor Device Research Symposium
Show All
- Source
- Cite
- Save
Citations (0)
Characterization of SiC PiN diode forward bias degradation

2004
Show All
- Source
- Cite
- Save
Citations (0)
Characterization of SiC PiN diode forward bias degradation

2004 IAS | IEEE Industry Applications Society Annual Meeting
Show All
- Source
- Cite
- Save
Citations (5)
MEMS-based embedded sensor virtual components for SoC

2003 ISDRS | International Semiconductor Device Research Symposium
Show All
- Source
- Cite
- Save
Citations (9)
High speed IGBT module transient thermal response measurements for model validation

2003 IAS | IEEE Industry Applications Society Annual Meeting
Show All
- Source
- Cite
- Save
Citations (28)
Test structures for referencing electrical linewidth measurements to silicon lattice parameters using HRTEM

2002 ICMTS | International Conference on Microelectronic Test Structures
Show All
- Source
- Cite
- Save
Citations (22)
ividing Pote r fo cision Feature lacement

1996
Show All
- Source
- Cite
- Save
Citations (0)
Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards | NIST

1994
Show All
- Source
- Cite
- Save
Citations (0)
Application of the modified voltage-dividing potentiometer to overlay metrology in a CMOS/bulk process

1994 ICMTS | International Conference on Microelectronic Test Structures
Show All
- Source
- Cite
- Save
Citations (0)
Test structure for the in-plane locations of project features with nanometer-level accuracy traceable to a coordinate measurement system

1993 ICMTS | International Conference on Microelectronic Test Structures
Show All
- Source
- Cite
- Save
Citations (5)