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Helmut Skapa
Helmut Skapa
Materials science
Polymer chemistry
Engineering drawing
Composite material
Etching (microfabrication)
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Laserbearbeitung von mikromechanischen Strukturen
2004
Walter Emili
Helmut Skapa
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Verfahren und Vorrichtung zur Beseitigung von Kontaminationen durch Ozonbehandlung
1999
Volker Becker
Doris Schielein
Helmut Skapa
Franz Laermer
Michael Offenberg
Andrea Schilp
Gregor Petermann
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A process for producing a micromechanical component
1998
Franz Laermer
Horst Muenzel
Michael Offenberg
Helmut Skapa
Heinz-Georg Vossenberg
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A process for the manufacture of acceleration sensors
1996
Horst Muenzel
Michael Offenberg
Klaus Heyers
Bernhard Elsner
Markus Lutz
Helmut Skapa
Heinz-Georg Vossenberg
Nicholas Buchan
Eckhard Graf
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