A process for producing a micromechanical component

A process for producing a micromechanical component, in particular a surface-micromechanical acceleration sensor, comprising the following steps in the following order: Providing a substrate (10); is providing an insulating layer (1, 2) on the substrate (10) in which a patterned wiring layer (3) buried; Providing a conductive layer (6) on the insulating layer (1, 2) having a first region (I) and a second region (III); Forming a movable member (25) in the first region (I) by forming first trenches (9) through the conductive layer (6) and passing an etchant through the first trenches (9) for removing at least a portion of the insulating layer (1 2) under the conductive layer (6); Encapsulating the formed movable member (25) in the first region (I) and forming a with the wiring layer (3) electrically connected to the contact element (20) in the second region (III) by forming second trenches (9 ') by the conductive layer (6); so that...