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Michael Stadtmüller
Michael Stadtmüller
Substrate (electronics)
Materials science
Trench
Semiconductor
Optoelectronics
5
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Memory and method for its preparation
2005
Alejandro Avellan
Matthias Goldbach
Thomas Hecht
Stefan Jakschik
Andreas Orth
Uwe Schröder
Michael Stadtmüller
Olaf Storbeck
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A method for introducing a trench in a semiconductor substrate and for depositing a covering layer
2004
Henry Bernhardt
Stefan Kainz
Michael Stadtmüller
Olaf Storbeck
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Trench capacitor structure and method for applying a cover layer and a mask in semiconductor substrates for Trenchätzprozesse
2004
Henry Bernhardt
Stefan Kainz
Michael Stadtmüller
Olaf Storbeck
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Überkonformes Herstellungsverfahren für eine Halbleiterstruktur
2004
Andreas Dietel
Matthias Förster
Jochen Geidl
Moritz Haupt
Wilhelm Kegel
Michael Stadtmüller
Olaf Storbeck
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About compliant manufacturing method of a semiconductor structure
2004
Andreas Dietel
Matthias Förster
Jochen Geidl
Moritz Haupt
Wilhelm Kegel
Michael Stadtmüller
Olaf Storbeck
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