Old Web
English
Sign In
Acemap
>
authorDetail
>
Steven Smith
Steven Smith
NXP Semiconductors
Atomic layer deposition
Analytical chemistry
Materials science
High-κ dielectric
Capacitor
3
Papers
130
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Low resistivity tungsten for contact metallization
2005
Microelectronic Engineering
Steven Smith
Khaled Aouadi
Josh Collins
Eric van der Vegt
M.T. Basso
M. Juhel
Simone Pokrant
Show All
Source
Cite
Save
Citations (24)
Evolution of materials technology for stacked-capacitors in 65 nm embedded-DRAM
2005
Solid-state Electronics
Eric Gerritsen
Nicolas Emonet
Christian Caillat
Nicolas Jourdan
Marc Piazza
David Fraboulet
Bruce Boeck
Audrey Berthelot
Steven Smith
Pascale Mazoyer
Show All
Source
Cite
Save
Citations (82)
Physical and electrical characterization of ALCVD TM TiN and WN x C y used as a copper diffusion barrier in dual damascene backend structures(08.2)
2002
Microelectronic Engineering
Steven Smith
Wei-Min Li
Kai-Erik Elers
Klaus Pfeifer
Show All
Source
Cite
Save
Citations (24)
1