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Khaled Aouadi
Khaled Aouadi
STMicroelectronics
Tungsten
Thin film
Analytical chemistry
Metallizing
Nucleation
1
Papers
24
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Low resistivity tungsten for contact metallization
2005
Microelectronic Engineering
Steven Smith
Khaled Aouadi
Josh Collins
Eric van der Vegt
M.T. Basso
M. Juhel
Simone Pokrant
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Citations (24)
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