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Erwin Hammerl
Erwin Hammerl
IBM
Crystallography
Crystal
Materials science
Optoelectronics
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2
Papers
22
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Application of thin crystalline Si3N4 structures in shallow trenches isolation structures
1996
A. Ajmera
David M. Dobuzinsky
Stephen Fugardi
Erwin Hammerl
Herbert L. Ho
James E. Moseman
J. Herbert Palm
Samuel C. Ramac
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A fully planarized 0.25 /spl mu/m CMOS technology for 256 Mbit DRAM and beyond
1995
VLSIT | Symposium on VLSI Technology
Gary B. Bronner
H. Aochi
M. Gall
Jeffrey P. Gambino
S. Gernhardt
Erwin Hammerl
Herbert L. Ho
J. Iba
H. Ishiuchi
Mark Anthony Jaso
R. Kleinhenz
T. Mii
M. Narita
Larry Alan Nesbit
W. Neumueller
A. Nitayama
T. Ohiwa
S. Parke
James Gardner Ryan
T. Sato
H. Takato
S. Yoshikawa
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Citations (22)
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