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Masahiro Noda
Masahiro Noda
Chemical-mechanical planarization
Materials science
Composite material
Polishing
Dielectric
3
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2024
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A process for producing semiconductor devices with metal replacement gate
2011
Takashi Ando
Leslie Charns
Jason E. Cummings
Jukasz J. Hupka
Dinesh R Koli
Tomohisa Konno
Mahadevaiyer Krishnan
Michael F. Lofaro
Jakub Nalaskowski
Masahiro Noda
Dinesh K. Penigalapati
Tatsuya Yamanaka
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Chemical-mechanical planarization processes for manufacturing FinFET devices
2011
Leslie Charns
Jason E. Cummings
Michael E. Guillorn
Josephine B. Chang
Lukasz J. Hupka
Dinesh Koli
Tomohisa Konno
Mahadevaiyer Krishnan
Michael F. Lofaro
Jakub Nalaskowski
Masahiro Noda
Dinesh K. Penigalapati
Tatsuya Yamanaka
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