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Tomohisa Konno
Tomohisa Konno
Chemical-mechanical planarization
Materials science
Composite material
Polishing
Dielectric
3
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Chemical-mechanical planarization processes for manufacturing FinFET devices
2011
Leslie Charns
Jason E. Cummings
Michael E. Guillorn
Josephine B. Chang
Lukasz J. Hupka
Dinesh Koli
Tomohisa Konno
Mahadevaiyer Krishnan
Michael F. Lofaro
Jakub Nalaskowski
Masahiro Noda
Dinesh K. Penigalapati
Tatsuya Yamanaka
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Production of units with metallic spare gates
2011
Takashi Ando
Leslie Charns
Jason E. Cummings
Jukasz J. Hupka
Dinesh Koli
Tomohisa Konno
Mahadevaiyer Krishnan
Michael F. Lofaro
Jakub Nalaskowski
Masahiro Noda
Dinesh K. Penigalapati
Tatsuya Yamanaka
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Aqueous dispersion for the chemical-mechanical polishing and chemical-mechanical polishing method
2005
Tomohisa Konno
Hirotaka Shida
Kiyonobu Kubota
Masayuki Hattori
Nobuo Kawahashi
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