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Dinesh R Koli
Dinesh R Koli
Materials science
Fabrication
Chemical-mechanical planarization
Composite material
Electronic engineering
4
Papers
3
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Integration scheme for a cobalt plated via
2018
Qiang Fang
Shafaat Ahmed
Zhiguo Sun
Jiehui Shu
Dinesh R Koli
Wei-Tsu Tseng
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Advanced Process Control for Variability Control in Chemical Mechanical Polishing Process
2016
Dinesh R Koli
Rachel Wan Hsiang Liang
Hong Jin Kim
Robert Solan
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Challenges of W CMP in 14nm and Beyond Logic Device Fabrication
2014
Hong Jin Kim
Robert Solan
Liqiao Qin
Si-Gyung Ahn
Bohra Girish
Dinesh R Koli
Venugopal Govindarajulu
Yongsik Moon Globalfoundries
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A process for producing semiconductor devices with metal replacement gate
2011
Takashi Ando
Leslie Charns
Jason E. Cummings
Jukasz J. Hupka
Dinesh R Koli
Tomohisa Konno
Mahadevaiyer Krishnan
Michael F. Lofaro
Jakub Nalaskowski
Masahiro Noda
Dinesh K. Penigalapati
Tatsuya Yamanaka
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