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Jeffrey T. Smith

Applied Materials

14

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150

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Pseudo-data Generation For Improving Clinical Named Entity Recognition

2020
- Jeffrey T. Smith
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A Novel Dry Selective Etch of SiGe for the Enablement of High Performance Logic Stacked Gate-All-Around NanoSheet Devices

2019 IEDM | International Electron Devices Meeting
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Enabling complimentary FET (CFET) fabrication: selective, isotropic etch of Group IV semiconductors (Conference Presentation)

2019
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DISPOSITIF À SEMI-CONDUCTEUR TRIDIMENSIONNEL ET PROCÉDÉ DE FABRICATION

2018
- Jeffrey T. Smith
- Anton deVilliers
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Self-aligned blocking integration demonstration for critical sub-30nm pitch Mx level patterning with EUV self-aligned double patterning

2018
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Self-aligned blocking integration demonstration for critical sub-30-nm pitch Mx level patterning with EUV self-aligned double patterning

2018 Journal of Micro-nanolithography Mems and Moems
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PROCÉDÉS DE FORMATION DE MOTIFS DE SUBSTRAT DE SOUS-RÉSOLUTION

2018
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Self-aligned blocking integration demonstration for critical sub-40nm pitch Mx level patterning

2017 Proceedings of SPIE
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EPE improvement thru self-alignment via multi-color material integration

2017 Proceedings of SPIE
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Texturation du dos d'un substrat

2014
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