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ken'iti sekimoto
ken'iti sekimoto
Thin film
Materials science
Chemical engineering
Tantalum
Inorganic chemistry
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カルボニルビス(ジエン)ルテニウム錯体、その製造方法、および薄膜の製造方法
2008
kazuhisa kouno
ken'iti sekimoto
noriaki oosima
tetuo sibuta ken
syuuzi kumagaya
yasusi furukawa
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ルテニウム化合物、その製造方法、ルテニウム含有薄膜及びその製造方法
2007
Yasushi Furukawa
Kazuhisa Kono
Kensho Oshima
Kenichi Sekimoto
Ken-ichi Tada
Satoru Yamakawa
yasusi furukawa
ken'iti tada
noriaki oosima
satosi yamakawa
kazuhisa kouno
ken'iti sekimoto
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Tantalum compounds, to a process for their preparation, tantalum-containing thin film, and a method of forming
2005
yasusi furukawa
ken'iti tada
noriaki oosima
satosi yamakawa
ken'iti sekimoto
mayumi takamori
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ルテニウム錯体、その製造方法、及び薄膜の製造方法
2002
Yasushi Furukawa
Kazuhisa Kono
Shuji Kumagai
Kensho Oshima
Kenichi Sekimoto
Tetsuo Shibutami
yasusi furukawa
noriaki oosima
kazuhisa kouno
tetuo sibuta ken
syuuzi kumagaya
ken'iti sekimoto
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Ruthenium complexes, a process for producing the same, and a method of manufacturing a thin film
2002
yasusi furukawa
noriaki oosima
kazuhisa kouno
tetuo sibuta ken
syuuzi kumagaya
ken'iti sekimoto
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