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Tantalum compounds, to a process for their preparation, tantalum-containing thin film, and a method of forming
Tantalum compounds, to a process for their preparation, tantalum-containing thin film, and a method of forming
2005
yasusi furukawa
ken'iti tada
noriaki oosima
satosi yamakawa
ken'iti sekimoto
mayumi takamori
Keywords:
Thin film
Tantalum
Materials science
Inorganic chemistry
Chemical engineering
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