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Maximilian Mayer
Maximilian Mayer
Carl Zeiss AG
Metrology
Fabrication
Optics
Optoelectronics
Extreme ultraviolet lithography
4
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59
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Fabrication and metrology of diffraction-limited soft x-ray optics for the EUV microlithography
2004
Udo Dinger
Guenther Seitz
Stefan Schulte
Frank Eisert
Christian Muenster
Stefan Burkart
Siegfried Stacklies
Christian Bustaus
Hubert Hoefer
Maximilian Mayer
Bernhard Fellner
Oliver Hocky
Markus Rupp
Klaus Riedelsheimer
Peter Kuerz
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Citations (17)
Mirror substrates for EUV lithography: progress in metrology and optical fabrication technology
2000
Udo Dinger
Frank Eisert
Holger Lasser
Maximilian Mayer
A. Seifert
Guenther Seitz
Siegfried Stacklies
Franz-Josef Stickel
Martin Weiser
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Citations (24)
Extreme ultraviolet lithography at Carl Zeiss: Manufacturing and metrology of aspheric surfaces with angstrom accuracy
1999
Journal of Vacuum Science & Technology B
H. Handschuh
J. Fröschke
M Jülich
Maximilian Mayer
M. Weiser
G. Seitz
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Citations (6)
High-precision interferometric testing of spherical mirrors with long radius of curvature
1991
Klaus R. Freischlad
Michael F. Kuechel
Wolfgang Wiedmann
Winfried Kaiser
Maximilian Mayer
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Citations (12)
1