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Rene Henricus Jozef Vervuurt
Rene Henricus Jozef Vervuurt
Silicon nitride
Materials science
In situ
Radical
Fluorine
2
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In-situ etching reaction analysis of silicon nitride in ALE by fluorine radicals
2019
The Japan Society of Applied Physics
Kazuya Nakane
Rene Henricus Jozef Vervuurt
Takayoshi Tsutsumi
Nobuyoshi Kobayashi
Masaru Hori
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Hydrogen plasma modification mechanism of silicon nitride surface by in-situ surface analysis
2018
The Japan Society of Applied Physics
Kazuya Nakane
Rene Henricus Jozef Vervuurt
Takayoshi Tsutsumi
Akiko Kobayashi
Nobuyoshi Kobayashi
Masaru Hori
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