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Hydrogen plasma modification mechanism of silicon nitride surface by in-situ surface analysis
Hydrogen plasma modification mechanism of silicon nitride surface by in-situ surface analysis
2018
Kazuya Nakane
Rene Henricus Jozef Vervuurt
Takayoshi Tsutsumi
Akiko Kobayashi
Nobuyoshi Kobayashi
Masaru Hori
Keywords:
Silicon nitride
In situ
Plasma
Chemical engineering
Materials science
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