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Suein Son
Suein Son
Samsung
Computer hardware
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Improving mask yield by implementing an advanced mask blank inspection system
2018
Gregg Inderhees
Bill Kalsbeck
Alexander Tan
Paul Chung
Jiuk Hur
Eric Kwon
Min Choo
Wonil Cho
Chan Uk Jeon
Il-Yong Jang
In-Yong Kang
JeongHun Seo
Suein Son
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MTO-like reference mask modeling for advanced inverse lithography technology patterns
2017
Jongju Park
Jongin Moon
Suein Son
Dong-Hoon Chung
Byung Gook Kim
Chan Uk Jeon
Patrick LoPresti
Shan Xue
Sonny Wang
Bill Broadbent
Soonho Kim
Jiuk Hur
Min Choo
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