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yu hirosi arimoto
yu hirosi arimoto
Kyushu University
Materials science
Optoelectronics
Polishing
Abrasive
Slurry
6
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2
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リサイクルが可能な酸化マンガン研磨剤の開発 (特集 第25回環境賞/環境技術をめぐる最近の動向) -- (第25回環境賞 優良賞)
1998
yu hirosi arimoto
tei hirosi kisii
kou nakamura
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化学的機械研磨と微細CMOS-LSI (特集:研究開発最前線--マルチメディア/パ-ソナル/ネットワ-ク時代への対応)
1997
yu hirosi arimoto
atusi fukuroda
tei hirosi kisii
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A method of making an abrasive agent manufacturing method and a semiconductor device using a Mn oxide and abrasive grains
1996
kou nakamura
kenzou hanawa
tei hirosi kisii
yu hirosi arimoto
sei nama ueda
meiryou hatada
rintarou suzuki
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Completely Planarized W Plugs using MnO2 CMP
1995
IEDM | International Electron Devices Meeting
Sadahiro Kishii
Rintaro Suzuki
Akiyoshi Ohishi
Yoshihiro Arimoto
tei hirosi kisii
rintarou suzuki
meiryou ooisi
yu hirosi arimoto
sadahiro kisii
rintarou suzuki
akiyosi ooisi
yosihiro arimoto
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