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Rintaro Suzuki
Rintaro Suzuki
Fujitsu
Chemical-mechanical planarization
Polishing
Slurry
Composite material
Tungsten
4
Papers
3
Citations
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Wide Feature Dielectric Planarization using MnO2 Slurry
1996
Symposium on VLSI Technology
Sadahiro Kishii
Ko Nakamura
Akiyoshi Ohishi
Yoshiko Okui
Rintaro Suzuki
Yoshihiro Arimoto
tei hirosi kisii
kou nakamura
meiryou ooisi
yosiko okui
rintarou suzuki
yu hirosi arimoto
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Completely planarized W plugs using MnO/sub 2/ CMP
1995
IEDM | International Electron Devices Meeting
Sadahiro Kishii
Rintaro Suzuki
A. Ohishi
Yoshihiro Arimoto
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Completely Planarized W Plugs using MnO2 CMP
1995
IEDM | International Electron Devices Meeting
Sadahiro Kishii
Rintaro Suzuki
Akiyoshi Ohishi
Yoshihiro Arimoto
tei hirosi kisii
rintarou suzuki
meiryou ooisi
yu hirosi arimoto
sadahiro kisii
rintarou suzuki
akiyosi ooisi
yosihiro arimoto
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Citations (2)
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