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Masahiro Sumisaka

Chiba University

5

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Highly c-axis-oriented ScAlN thin films deposited using Sc-Al alloy target

2015 IMS | International Microwave Symposium
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Sputter deposition of ScAlN using large size alloy target with high Sc content and reduction of Sc content in deposited films

2015 Japanese Journal of Applied Physics
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Deposition of highly c-axis-oriented ScAlN thin films by RF magnetron sputtering using a Sc-Al alloy target

2014 FCS | International Frequency Control Symposium
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ScAlN Lamb wave resonator in GHz range released by XeF 2 etching

2013 IUS | Internaltional Ultrasonics Symposium
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Citations (31)