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Akira Konno

Tohoku University

4

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Determination of full material constants of ScAlN thin film from bulk and leaky Lamb waves in MEMS-based samples

2014 IUS | Internaltional Ultrasonics Symposium
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ScAlN Lamb wave resonator in GHz range released by XeF 2 etching

2013 IUS | Internaltional Ultrasonics Symposium
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Tunable Surface Acoustic Wave Filter Using Integrated Micro-Electro-Mechanical-System Based Varactors Made of Electroplated Gold

2013 Japanese Journal of Applied Physics
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Measurements of the Mechanical Properties of a Polymer Solution

1968 Japanese Journal of Applied Physics
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