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Hyeongwoo Seo
Hyeongwoo Seo
Computer science
X-ray lithography
Stencil lithography
Electron-beam lithography
Electron optics
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The Multi Arrayed Micro-scale Electron Optical System for Electron Beam Lithography using MEMS Technology
2002
SDM | SIAM International Conference on Data Mining
Hak Joong Kim
Changho Han
Kiyong Lee
Hyeongwoo Seo
Kukjin Chun
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