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Rainer Boerret

Carl Zeiss AG

4

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20

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ArF step-and-scan system with 0.75 NA for the 0.10μm node

2001
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Manufacturing technologies for high-throughput imaging x-ray telescopes: XMM carbon fiber reinforced plastic (CFRP) technology compared to other x-ray systems

1994
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Measurement and analysis of a set of mandrels for the JET-X x-ray optics

1993
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