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so fukawa takuzi
so fukawa takuzi
Materials science
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An electrostatic chuck for attracting and holding the wafer
2013
zhongjinhu
go nakasuzi
nozi sinzi
sinzi nozi
satake tooru
tooru satake
kinba tosifumi
tosifumi kinba
so fukawa takuzi
takuzi so fukawa
karimata tutomu
tutomu karimata
oowada sin
sin oowada
yosikawa syouzi
syouzi yosikawa
saitou mutumi
mutumi saitou
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Sample surface inspection method and apparatus
2007
nozi sinzi
sinzi nozi
naitou yosihiko
yosihiko naitou
so fukawa takuzi
takuzi so fukawa
kenzi terao
hatakeyama masanori
masanori hatakeyama
aocunshengmi
katuya okumura
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組合せ的工学問題解決のためのNECO/NODEシステムの開発 (第1報)
1992
Journal of The Japan Society for Precision Engineering
itou kimitosi
takada masayuki
kawano hen mamoru
so fukawa takuzi
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