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An electrostatic chuck for attracting and holding the wafer
An electrostatic chuck for attracting and holding the wafer
2013
zhongjinhu
go nakasuzi
nozi sinzi
sinzi nozi
satake tooru
tooru satake
kinba tosifumi
tosifumi kinba
so fukawa takuzi
takuzi so fukawa
karimata tutomu
tutomu karimata
oowada sin
sin oowada
yosikawa syouzi
syouzi yosikawa
saitou mutumi
mutumi saitou
Keywords:
Wafer
Composite material
Materials science
Optoelectronics
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