Sample surface inspection method and apparatus

To provide a method and apparatus capable of accurate sample surface inspection. A method of inspecting a specimen surface with an electron beam-type sample surface inspection apparatus, an electron beam generated from an electron gun of the sample surface inspection apparatus irradiating the sample surface, secondary electrons generated from the sample surface in the method an image is formed toward the electron detection surface of the detector for inspecting the sample surface, irradiating the secondary electrons of the imaging condition on the detection surface of the detector, the potential of the sample surface is the surface of the sample characterized in that the control such monkey vary according to the amount of electron beams