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Hidetoshi Sato
Hidetoshi Sato
Hitachi
Electronic engineering
Optical proximity correction
Engineering
System on a chip
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4
Papers
5
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New method of contour-based mask-shape compiler
2007
Ryoichi Matsuoka
Akiyuki Sugiyama
Akira Onizawa
Hidetoshi Sato
Yasutaka Toyoda
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Improved Image Placement Performance of HL-7000M
2003
Masaomi Tanaka
Hiroyuki Ito
Hiroyuki Takahashi
Kazuyoshi Oonuki
Yasuhiro Kadowaki
Hidetoshi Sato
Hajime Kawano
Zhigang Wang
Kazui Mizuno
Genya Matsuoka
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Technological capability and future enhanced performance of HL-7000M
2003
Masaomi Tanaka
Suyo Asai
Hajime Kawano
Ken Iizumi
Kazuyoshi Oonuki
Hiroyoshi Takahashi
Hidetoshi Sato
Rikio Tomiyoshi
Kazui Mizuno
Genya Matsuoka
Hiroya Ohta
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Citations (2)
Advanced CD Linearity Improvement for Multi-Project Wafers and SoC at 95 nm Technology Node
2002
Jeremy Lu
Nicole L. Sandlin
Hidetoshi Sato
Colbert Lu
Nicole Cheng
Torey Huang
Clyde Su
Melisa J. Buie
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