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Syue-Ren Wu
Syue-Ren Wu
Electronic engineering
Materials science
Chemical-mechanical planarization
Slurry
Fresnel diffraction
4
Papers
170
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Virtual metrology for 3D vertical stacking processes in semiconductor manufacturing
2016
Syue-Ren Wu
Chun-Fu Chen
Tuung Luoh
Ling-Wuu Yang
Tahone Yang
Kuang-Chao Chen
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Citations (3)
Dishing and erosion amount prediction according pattern density calculation algorithm in 3D design layout — Kuang-Wei Chen
2015
ISSM | International Symposium on Semiconductor Manufacturing
Hsiao-Feng Kao
Tung-He Chou
Syue-Ren Wu
Chun-Fu Chen
Tuung Luoh
Ling-Wuu Yang
Tahone Yang
Kuang-Chao Chen
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Citations (2)
Slurry selectivity to local thickness variations control in advanced Cu CMP process
2015
CSTIC | China Semiconductor Technology International Conference
K.-C. Chen
Tung-He Chou
Syue-Ren Wu
Chun-Fu Chen
Yung Tai Hung
Tuung Luoh
Ling-Wuu Yang
Tahone Yang
Kuang-Chao Chen
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Citations (1)
Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution
2008
Applied Physics Letters
Y S Chu
Jaemock Yi
F De Carlo
Qiang Shen
Wah-Keat Lee
Hong Wu
Cheng Liang Wang
Jin Wang
Chian Liu
C. H. Wang
Syue-Ren Wu
Chia-Chi Chien
Yeukuang Hwu
A. Tkachuk
Wenbing Yun
M. Feser
Keng S. Liang
C. S. Yang
J. H. Je
Giorgio Margaritondo
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Citations (164)
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