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Tung-He Chou
Tung-He Chou
Chemical-mechanical planarization
Slurry
Wafer fabrication
Semiconductor device modeling
Production planning
3
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3
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Capacity simulation by cellular automation in endura platform
2016
Tung-He Chou
Yu-Chih Chang
Binglung Yu
Chun-Fu Chen
Yung Tai Hung
Tuung Luoh
Ling-Wuu Yang
Tahone Yang
Kuang-Chao Chen
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Dishing and erosion amount prediction according pattern density calculation algorithm in 3D design layout — Kuang-Wei Chen
2015
ISSM | International Symposium on Semiconductor Manufacturing
Hsiao-Feng Kao
Tung-He Chou
Syue-Ren Wu
Chun-Fu Chen
Tuung Luoh
Ling-Wuu Yang
Tahone Yang
Kuang-Chao Chen
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Slurry selectivity to local thickness variations control in advanced Cu CMP process
2015
CSTIC | China Semiconductor Technology International Conference
K.-C. Chen
Tung-He Chou
Syue-Ren Wu
Chun-Fu Chen
Yung Tai Hung
Tuung Luoh
Ling-Wuu Yang
Tahone Yang
Kuang-Chao Chen
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