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Mylène Savoye
Mylène Savoye
STMicroelectronics
Metal gate
Engineering
Logic gate
Gate dielectric
High-κ dielectric
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Defect reduction for 20nm high-k metal gate technology
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Vincent Charbois
Julie Lebreton
Mylène Savoye
Eric Labonne
Antoine Labourier
B. Dumont
Chet Lenox
Mike von Den Hoff
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