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Robert Gruenberger
Robert Gruenberger
Infineon Technologies
Materials science
Optoelectronics
Resonator
Air gap (plumbing)
Semiconductor
4
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4
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(Invited) Integration of an Epitaxial-Base-Link HBT Device with fT = 300GHz, fmax 480GHz in 90nm CMOS
2020
Dirk Manger
Josef Boeck
K. Aufinger
Sabine Boguth
Robert Gruenberger
Thomas Popp
Boris Binder
Claudia Hengst
Soran Majied
Matthias Markert
Andreas Pribil
Steffen Rothenhaeusser
Dmitri Alex Tschumakow
Claus Dahl
Thomas Bever
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Microelectromechanical system components
2009
Robert Gruenberger
Karlheinz Mueller
Bernhard Winkler
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MEMS device, semiconductor chip and process for its preparation
2009
Robert Gruenberger
Karlheinz Mueller
Bernhard Winkler
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Temperature Compensation in Silicon-Based Micro-Electromechanical Resonators
2009
MEMS | International Conference on Micro Electro Mechanical Systems
F. Schoen
M. Nawaz
T. Bever
Robert Gruenberger
Wolfgang Raberg
Werner Weber
Bernhard Winkler
R. Weigel
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Citations (4)
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