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tokuhira masaya
tokuhira masaya
Materials science
Sputtering
Inorganic chemistry
Analytical chemistry
Mineralogy
3
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Cu, sputtering target containing In, a method of manufacturing a powder containing an element of Ga and Se, and Cu, In, elements of Ga and Se
2010
tokuhira masaya
masaya tokuhira
asahi nanbu
sigeo kasiwai
fukuzumi masafumi
masafumi fukuzumi
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Cu-Ga alloy sputtering target and its manufacturing method
2010
hiromi matumura
asahi nanbu
tokuhira masaya
masaya tokuhira
sinya okamoto
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CIBLE DE PULVÉRISATION CATHODIQUE EN ALLIAGE Cu-Ga ET SON PROCÉDÉ DE FABRICATION
2010
Hiromi Matsumura
hiromi matumura
Akira Nanbu
asahi nanbu
Masaya Ehira
tokuhira masaya
Shinya Okamoto
sinya okamoto
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