Old Web
English
Sign In
Acemap
>
authorDetail
>
M. S. Akbar
M. S. Akbar
SEMATECH
Electron mobility
Dielectric
MOSFET
Analytical chemistry
Atomic layer deposition
4
Papers
33
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
High-k dielectric process development for enhanced electron mobility in high performance field effect transistors
2005
P. D. Kirsch
Jeff J. Peterson
Jim Gutt
Sundar Gopalan
Siddarth Krishnan
H. J. Li
M. A. Quevedo-Lopez
M. S. Akbar
Joel Barnett
Naim Moumen
J. H. Sim
S. C. Song
P. Lysaght
C. Huffman
Prashant Majhi
M. Gardner
George A. Brown
G. Bersuker
B. H. Lee
Show All
Source
Cite
Save
Citations (0)
Effect of NH3 surface nitridation temperature on mobility of ultrathin atomic layer deposited HfO2
2005
Applied Physics Letters
M. S. Akbar
Naim Moumen
Joel Barnett
J. H. Sim
Jack C. Lee
Show All
Source
Cite
Save
Citations (10)
Integration of dual metal gate CMOS with TaSiN (NMOS) and Ru (PMOS) gate electrodes on HfO/sub 2/ gate dielectric
2005
VLSIT | Symposium on VLSI Technology
Zhibo Zhang
S. C. Song
C. Huffman
Joel Barnett
Naim Moumen
Husam N. Alshareef
Prashant Majhi
Muhammad Mustafa Hussain
M. S. Akbar
J. H. Sim
S. H. Bae
B. Sassman
Byoung Hun Lee
Show All
Source
Cite
Save
Citations (23)
Process effects and characterization of Hf-based dielectrics
2005
Jack C. Lee
S. J. Rhee
C. S. Kang
Chang Hwan Choi
Siddarth A. Krishnan
Injo Ok
M. S. Akbar
H. Kim
F. Zhu
Manhong Zhang
T. Lee
Show All
Source
Cite
Save
Citations (0)
1