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Atsushi Ogino
Atsushi Ogino
IBM
Electronic engineering
Artificial intelligence
Contact resistance
Psychology
Engineering physics
2
Papers
1
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0
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ALD TaN Barrier for Enhanced Performance with Low Contact Resistance for 14nm Technology Node Cu Interconnects
2015
Joyeeta Nag
Brian A. Cohen
Samuel Choi
Atsushi Ogino
Minseok Oh
Yan Yan
Jim Liang
Cathryn Christiansen
Andrew Kim
Baozhen Li
Patrick W. DeHaven
Anita Madan
Siddarth A. Krishnan
Andrew H. Simon
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Application of E-beam hot spot inspection for early detection of systematic patterning problems to a FinFET technology
2015
Journal of Micro-nanolithography Mems and Moems
Deborah Ryan
Oliver D. Patterson
Shuen-Cheng Chris Lei
David Conklin
Jim Liang
Glenn A. Biery
Atsushi Ogino
Bachir Dirahoui
Zachary Baum
Mike D. Monkowski
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