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Mike D. Monkowski
Mike D. Monkowski
IBM
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Electronic engineering
Hot spot (veterinary medicine)
early detection
Nanotechnology
2
Papers
16
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0
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Application of E-beam hot spot inspection for early detection of systematic patterning problems to a FinFET technology
2015
Journal of Micro-nanolithography Mems and Moems
Deborah Ryan
Oliver D. Patterson
Shuen-Cheng Chris Lei
David Conklin
Jim Liang
Glenn A. Biery
Atsushi Ogino
Bachir Dirahoui
Zachary Baum
Mike D. Monkowski
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Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection
2013
ASMC | Advanced Semiconductor Manufacturing Conference
Oliver D. Patterson
Deborah Ryan
Mike D. Monkowski
D. Nguyen-Ngoc
Bradley Morgenfeld
Chung-ham Lee
Chieh-hung Liu
Chi-Ming Chen
Shih-tsung Chen
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Citations (16)
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